KXS Semiconductor DCM-10 Inline Concentration Monitor

product
Thumbnail for product a

product code:DCM-10

manufacturer:KXS

share:

Introducing the KxS semiconductor monitor DCM-10, a cutting-edge optical refractometer designed for real-time monitoring of wet chemicals in almost all processing steps that involve wafer processing with liquid chemicals or mixtures. The DCM-10 is renowned for its high accuracy and reliability, making it an essential concentration monitoring tool for incoming chemical check, wafer cleaning, chemical etching and chemical mechanical planarization (CMP). The DCM-10 operates with a 24 VDC input power supply and offers flexible communication options, including analog (4-20 mA) and digital (Modbus TCP). When using the analog signal, the digital port serves as a service port for configuration and diagnostics via a computer web browser, external display, or mobile device. All port options can be utilized simultaneously, providing seamless integration and monitoring capabilities. Factory calibrated for refractive index measurements, the DCM-10 displays temperature-compensated concentration units in % by weight or g/cm³. This ensures accurate and consistent monitoring of chemical concentrations, critical for maintaining process integrity and quality.
  • True standalone operation: All measurement functions contained within the sensor, eliminating the need for an external transmitter.
  • Extra small footprint design: The compact sensor and flow are ideal and fit into fab tools and benches.
  • Excellent flow properties: True full bore; Optimized laminar flow pattern with minimal shear force on liquid (Patent pending).
  • Easy installation: Connects with process line sizes of ¼, ⅜, ½, ¾, and 1 inch, using standard fittings.
  • Dual-body construction: Optical components remain intact even if the flow cell is removed, ensuring consistent performance.
  • Material compatibility: Materials designed to withstand the demanding conditions of semiconductor processing in the facilities and cleanroom environments.

similar products

product

Arjay FluoroCheck II Benchtop Unit for Petroleum Oils

view
product

Arjay HydroSense 2410 Continuous Non-Contacting for Hazardous Locations

view
product

Arjay HydroSense 4410-LMP Continuous Non-Contacting for Ordinary Locations

view
product

Arjay HydroSense 4410-OCM Continuous Closed-Loop for Cleaned Water Applications

view
product

Arjay HydroSense 4420-OCM Continuous Closed-Loop for All Oil Types

view
product

Exner ECI-01 EXcell Communication Interface

view
product

Exner ECI-01 EXspect Communication Interface

view
product

Exner ECI-02 Communication Interface

view
product

Exner ECI-03 Communication Interface

view
product

Exner EXcap 110 Set of Optical Reference Filters

view

Siemens Catalogue

View the Siemens Products for Process Instrumentation catalogue.
view here
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture
manufacture